完全弄懂X射线光电子能谱（XPS） - 知乎
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EDS与XPS的不同点：. 基本原理不同: XPS是用X射线打出电子，检测的是电子；EDS则是用电子打出X射线，检测的是X射线。. 灵敏度和获得信息不同：EDS只能检测元素的组成与含量，不能测定元素的价态，且EDX的检测限较高（含量＞2%），即其灵敏度较低。. 而XPS既可以 ...
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